Muva nje, abangani abaningi babuze mayelana nezici ze-molybdenum sputtering targets.Embonini ye-elekthronikhi, ukuze kuthuthukiswe ukusebenza kahle kwe-sputtering nokuqinisekisa ikhwalithi yamafilimu adiphozithiwe, yiziphi izimfuneko zezimpawu zokuhlosiwe kwe-molybdenum sputtering?Manje ochwepheshe bezobuchwepheshe be-RSM bazosichazela.
1. Ubumsulwa
Ukuhlanzeka okuphezulu kuyisidingo esiyisisekelo sethagethi ye-molybdenum sputtering.Ukuphakama kokuhlanzeka kwethagethi ye-molybdenum, kuba ngcono ukusebenza kwefilimu enamabala.Ngokuvamile, ukuhlanzeka kwethagethi ye-molybdenum sputtering kufanele okungenani kube ngu-99.95% (ingxenyana yobuningi, efanayo ngezansi).Kodwa-ke, ngokuthuthuka okuqhubekayo kosayizi we-substrate yengilazi embonini ye-LCD, ubude bezintambo kuyadingeka ukuba banwetshwe futhi ububanzi bomugqa kudingeka bube buncane.Ukuze kuqinisekiswe ukufana kwefilimu kanye nekhwalithi yezintambo, ukuhlanzeka kwethagethi ye-molybdenum sputtering nakho kuyadingeka ukuthi kwandiswe ngokufanele.Ngakho-ke, ngokuya ngosayizi we-substrate yengilazi ehlutshiwe kanye nendawo yokusetshenziswa, ukuhlanzeka kwethagethi ye-molybdenum sputtering kuyadingeka ukuthi kube ngu-99.99% - 99.999% noma ngaphezulu.
Ithagethi ye-molybdenum sputtering isetshenziswa njengomthombo we-cathode ekuqhumeni.Ukungcola okuqinile kanye nomoya-mpilo kanye nomhwamuko wamanzi ezimbotsheni kuyimithombo eyinhloko yokungcola yamafilimu afakiwe.Ngaphezu kwalokho, embonini ye-elekthronikhi, ngoba ama-ion ensimbi ye-alkali (Na, K) kulula ukuba ama-ion ahambayo kungqimba lokufakelwa, ukusebenza kwedivayisi yokuqala kuyancishiswa;Izinto ezifana ne-uranium (U) ne-titanium (TI) zizokhishwa i-α X-ray, okuholela ekuqhekekeni okuthambile kwamadivayisi;I-ayoni ne-nickel ions izodala ukuvuza kwe-interface kanye nokwanda kwezakhi ze-oxygen.Ngakho-ke, enqubweni yokulungiselela ithagethi ye-molybdenum sputtering, lezi zakhi zokungcola zidinga ukulawulwa ngokuqinile ukuze kuncishiswe okuqukethwe kwazo kulokho okuhlosiwe.
2. Usayizi wokusanhlamvu nokusabalalisa kosayizi
Ngokuvamile, okuhlosiwe kwe-molybdenum sputtering isakhiwo se-polycrystalline, futhi usayizi wokusanhlamvu ungasukela ku-micron kuya kumamilimitha.Imiphumela yokuhlolwa ikhombisa ukuthi izinga lokufafaza lethagethi yezinhlamvu ezinhle lishesha kunalelo lethagethi yezinhlamvu ezimahhadla;Okokuhlosiwe okunomehluko omncane kasayizi wokusanhlamvu, ukusatshalaliswa kogqinsi kwefilimu efakiwe nakho kufana kakhulu.
3. I-Crystal orientation
Ngenxa yokuthi ama-athomu okuhlosiwe kulula ukuba aqhunyiswe ngokuncanyelwayo ngakundlela yokuhlelwa okuseduze kwama-athomu ohlangothini olunezinhlangothi ezine ngesikhathi sokufafaza, ukuze kufinyelelwe izinga eliphezulu lokufafaza, izinga lokufafaza livame ukukhuphuka ngokushintsha ukwakheka kwekristalu kwalokho okuhlosiwe.Ukuqondiswa kwekristalu kwethagethi nakho kunethonya elikhulu ekufaneni kogqinsi kwefilimu ene-sputtered.Ngakho-ke, kubaluleke kakhulu ukuthola isakhiwo esithile esiqondiswe ku-crystal senqubo ye-sputtering yefilimu.
4. Ukuminyana
Enqubweni yokufafaza, lapho ithagethi yokufafaza enobukhulu obuphansi iqhunyiswa ngebhomu, igesi ekhona ezimbotsheni zangaphakathi zethagethi idedelwa kungazelelwe, okuholela ekusakazeni kwezinhlayiya noma izinhlayiya eziqondiwe ezinosayizi omkhulu, noma ifilimu iqhunyiswa ngebhomu. ngama-electron esibili ngemva kokwakheka kwefilimu, okuholela ekusakazeni kwezinhlayiyana.Ukubonakala kwalezi zinhlayiya kuzonciphisa izinga lefilimu.Ukuze kuncishiswe izimbotshana endaweni eqinile okuqondiwe kuyo futhi kuthuthukiswe ukusebenza kwefilimu, okuhloswe ukuqhunyiswa ngokuvamile kuyadingeka ukuze kube nokuminyana okuphezulu.Ngethagethi ye-molybdenum sputtering, ukuminyana kwayo kufanele kube ngaphezu kwama-98%.
5. Ukubopha ithagethi kanye ne-chassis
Ngokuvamile, i-molybdenum sputtering target kufanele ixhunywe ne-chassis ye-oxygen engenawo umoya-mpilo (noma i-aluminium nezinye izinto) ngaphambi kokufafaza, ukuze ukuhanjiswa okushisayo kwethagethi kanye ne-chassis kube kuhle ngesikhathi senqubo yokufafaza.Ngemuva kokubopha, ukuhlolwa kwe-ultrasonic kufanele kwenziwe ukuze kuqinisekiswe ukuthi indawo engabopheli kokubili ingaphansi kuka-2%, ukuze kuhlangatshezwane nezidingo zokuphalaza kwamandla ngaphandle kokuwa.
Isikhathi sokuthumela: Jul-19-2022