Eminyakeni yamuva nje, ngokuqhubeka kobuchwepheshe besekethe edidiyelwe (IC), ukusetshenziswa okuhlobene kwamasekethe ahlanganisiwe kuye kwathuthukiswa ngokushesha.Ithagethi ye-alloy sputtering ye-aluminiyamu ye-Ultra ehlanzekile, njengento esekelayo ekwenziweni koxhumano lwensimbi yesekethe ehlanganisiwe, isiphenduke isihloko esishisayo ocwaningweni lwasekhaya lwakamuva.umhleli we-RSM uzosibonisa izici zokuhlanzeka okuphezulu kwe-aluminium alloy sputtering target.
Ukuze kuthuthukiswe ukusebenza kahle kwe-sputtering kwethagethi ye-magnetron sputtering nokuqinisekisa ikhwalithi yamafilimu afakiwe, inani elikhulu lokuhlola libonisa ukuthi kunezidingo ezithile zokwakheka, i-microstructure kanye ne-grain orientation ye-ultra-high purity aluminium alloy sputtering target.
Usayizi wokusanhlamvu nokuma kwezinhlamvu okuhlosiwe kunethonya elikhulu ekulungiseni nasezimpahleni zamafilimu e-IC.Imiphumela ibonisa ukuthi izinga lokubeka liyancipha ngokukhula kosayizi wokusanhlamvu;Ngethagethi yokufafaza enokwakheka okufanayo, izinga lokufafaza lalokho okuqondiwe okunosayizi omncane wokusanhlamvu liyashesha kunalelo eliqondiwe elinosayizi omkhulu wokusanhlamvu;Uma usayizi wokusanhlamvu wethagethi ufana kakhulu, kulapho ukuqina kokusabalalisa kwamafilimu afakiwe kufana.
Ngaphansi kwethuluzi lokufafaza elifanayo namapharamitha okucubungula, izinga lokufafaza lethagethi ye-Al Cu alloy liyakhuphuka ngokukhula kokuminyana kwe-athomu, kodwa ngokuvamile lizinzile ebangeni.Umthelela wosayizi wokusanhlamvu ngezinga lokufafaza kungenxa yokushintsha kokuminyana kwe-athomu ngokushintsha kosayizi wokusanhlamvu;Izinga lokubeka lithinteka kakhulu umumo wokusanhlamvu wethagethi yengxubevange ye-Al Cu.Ngesisekelo sokuqinisekisa ukuthi ingxenye (200) yezindiza zekristalu, ukwanda kwengxenye (111), (220) kanye (311) yezindiza zekristalu kuzokwandisa izinga lokubeka.
Usayizi wokusanhlamvu nokuma kwezinhlamvu okuhlosiwe kwe-alloy alloy ye-ultra-high kulungiswa futhi kulawulwa yi-ingot homogenization, ukusebenza okushisayo kanye ne-recrystallization annealing.Ngokuthuthukiswa kosayizi we-wafer ukuya ku-20.32cm (8in) kanye no-30.48cm (12in), usayizi oqondiwe nawo uyakhuphuka, okubeka phambili izidingo eziphakeme zokuhloswa kwe-ultra-high purity aluminium alloy sputtering.Ukuze kuqinisekiswe ikhwalithi yefilimu kanye nesivuno, amapharamitha okucubungula okuqondiwe kufanele alawulwe ngokuqinile ukuze kwenziwe i-microstructure eqondiwe ifane futhi umumo wokusanhlamvu ube nokwakheka kwendiza okuqinile (200) kanye (220).
Isikhathi sokuthumela: Jun-30-2022