Ucwaningo olusha kujenali Idayimane kanye Nezinto Ezihlobene Nazo ligxile ekucushweni kwedayimane le-polycrystalline eline-FeCoB etchant ukuze kwakheke amaphethini.Njengomphumela walokhu kuqanjwa okuthuthukisiwe kwezobuchwepheshe, izindawo zedayimane zingatholakala ngaphandle kokulimala kanye neziphambeko ezimbalwa.
Ucwaningo: Ukuqoshwa okukhethiwe kwendawo kwedayimane esimweni esiqinile kusetshenziswa i-FeCoB enephethini yezithombe.Ikhredithi yesithombe: Bjorn Wilezic/Shutterstock.com
Ngenqubo yokusabalalisa isimo esiqinile, amafilimu e-FeCoB nanocrystalline (Fe:Co:B=60:20:20, isilinganiso se-athomu) angafinyelela ukuqondiswa kwe-lattice nokuqedwa kwamadayimane kusakhiwo esincane.
Amadayimane anezimfanelo eziyingqayizivele ze-biochemical nezibonwayo, kanye nokunwebeka okuphezulu namandla.Ukuqina kwayo okwedlulele kuwumthombo obalulekile wenqubekelaphambili ekwenzeni ukunemba kwe-ultra (ubuchwepheshe bokuguqula idayimane) kanye nendlela eya ezingcindezini ezidlulele ebangeni lamakhulu e-GPa.
Ukungangenisi kwamakhemikhali, ukuqina okubonakalayo kanye nomsebenzi webhayoloji kukhulisa amathuba edizayini ezinhlelo ezisebenzisa lezi zimfanelo zokusebenza.Idayimane isizakhele igama emkhakheni we-mechatronics, optics, izinzwa nokuphathwa kwedatha.
Ukuze uvumele ukusetshenziswa kwawo, ukubopha amadayimane kanye nephethini yawo kudala izinkinga ezisobala.I-Reactive ion etching (RIE), i-plasma ehlanganiswe nge-inductively (ICP), kanye ne-electron induced etching yizibonelo zezinhlelo ezikhona zenqubo ezisebenzisa amasu okufaka (EBIE).
Izakhiwo zedayimane nazo zenziwa kusetshenziswa izindlela zokucubungula i-laser kanye ne-focused ion beam (FIB).Inhloso yale nqubo yokwenziwa ukusheshisa ukuchithwa kwe-delamination kanye nokuvumela ukukala ezindaweni ezinkulu ezakhiweni zokukhiqiza ezilandelanayo.Lezi zinqubo zisebenzisa i-liquid etchants (i-plasma, amagesi, nezixazululo eziwuketshezi), ezikhawulela inkimbinkimbi yejiyomethri efinyelelekayo.
Lo msebenzi obalulekile ucwaninga ukukhishwa kwezinto ngokukhiqizwa komhwamuko wamakhemikhali futhi udala idayimane le-polycrystalline eline-FeCoB (Fe:Co:B, 60:20:20 amaphesenti angu-athomu) ngaphezulu.Ukunakwa okuyinhloko kukhokhwa ekwakhiweni kwamamodeli we-TM wokufakwa okunembile kwezakhiwo zesikali samamitha kumadayimane.Idayimane elingaphansi liboshelwe ku-nanocrystalline FeCoB ngokwelashwa kokushisa ku-700 kuya ku-900°C imizuzu engama-30 kuya kwengama-90.
Ungqimba oluqinile lwesampula yedayimane lubonisa i-polycrystalline microstructure engaphansi.Ubulukhuni (Ra) phakathi kwezinhlayiyana ezithile babungu-3.84 ± 0.47 nm, futhi ubulukhuni obuphelele bobuso babungu-9.6 ± 1.2 nm.Ubulukhuni (ngaphakathi kohlamvu olulodwa lwedayimane) longqimba lwensimbi lwe-FeCoB olufakiwe buyi-3.39 ± 0.26 nm, futhi ukuphakama kongqimba kungu-100 ± 10 nm.
Ngemva kokufakwa kwe-anneal ku-800 ° C imizuzu engu-30, ukushuba kwendawo yensimbi kukhuphuke kwafinyelela ku-600 ± 100 nm, futhi ukuhwaqeka kwendawo (Ra) kwanda ku-224 ± 22 nm.Phakathi ne-annealing, ama-athomu e-carbon asakazeka kungqimba lwe-FeCoB, okuholela ekwandeni kosayizi.
Amasampula amathathu anezendlalelo ze-FeCoB ezinogqinsi ongu-100 nm ashiswe emazingeni okushisa angu-700, 800, no-900°C, ngokulandelana.Uma izinga lokushisa lingaphansi kuka-700°C, akukho ukubopha okubalulekile phakathi kwedayimane ne-FeCoB, futhi kuncane kakhulu okukhishiwe okukhishiwe ngemva kokwelashwa nge-hydrothermal.Ukususwa kwezinto kuthuthukiswa kuze kufike emazingeni okushisa angaphezu kuka-800 ° C.
Lapho izinga lokushisa lifinyelela ku-900°C, izinga lokushisa lenyuka kabili uma liqhathaniswa nezinga lokushisa elingu-800°C.Kodwa-ke, iphrofayili yesifunda esimisiwe ihluke kakhulu kuleyo yokulandelana kwe-etch etshaliwe (FeCoB).
Uhlelo olubonisa ukubonakala kwe-etchant yesimo esiqinile ukuze kudalwe iphethini: Ukuqoshwa kwesimo esiqinile kwedayimane kusetshenziswa i-FeCoB enephethini yesithombe.Ikhredithi yesithombe: Van Z. no-Shankar MR et al., Amadayimane Nezinto Ezihlobene.
Amasampula e-FeCoB angu-100 nm obukhulu kumadayimane acutshungulwa ku-800°C imizuzu engama-30, engu-60, nengama-90, ngokulandelana.
Ubulukhuni (Ra) bendawo eqoshiwe bunqunywe njengomsebenzi wesikhathi sokuphendula ku-800°C.Ukuqina kwamasampula ngemva kokuhlanganisa imizuzu engama-30, 60 kanye nengama-90 kwakungu-186±28 nm, 203±26 nm kanye no-212±30 nm, ngokulandelana.Ngokujula kwe-etch okungu-500, 800, noma okungu-100 nm, isilinganiso (RD) sobunzima bendawo eqoshwe ekujuleni kwe-etch ngu-0.372, 0.254, no-0.212, ngokulandelana.
Ubulukhuni bendawo enamathiselwe abukhuli kakhulu ngokujula okwandayo kwe-etching.Kutholwe ukuthi izinga lokushisa elidingekayo ekuphenduleni phakathi kwedayimane ne-HM etchant lingaphezu kuka-700°C.
Imiphumela yocwaningo ikhombisa ukuthi i-FeCoB ingasusa ngempumelelo amadayimane ngenani elishesha kakhulu kune-Fe noma i-Co kuphela.
Isikhathi sokuthumela: Aug-31-2023