Njengamanje, cishe zonke izinhloso zethusi zensimbi ehlanzekile esezingeni eliphezulu ezidingwa imboni ye-IC ziphethwe izinkampani ezinkulu zamazwe ngamazwe eziningana.Zonke izinhloso zethusi ze-ultrapure ezidingwa imboni yasekhaya ye-IC zidinga ukungeniswa kwamanye amazwe, okungabizi nje kuphela, kodwa futhi eziyinkimbinkimbi ezinqubweni zokungenisa ezweni Ngakho-ke, i-China idinga ngokuphuthumayo ukuthuthukisa ukuthuthukiswa nokuqinisekiswa kwemigomo ye-ultra-high purity (6N) ye-copper sputtering. .Ake sibheke amaphuzu abalulekile nobunzima ekuthuthukisweni kokuhlanzeka okuphezulu kakhulu (6N) okuhlosiwe kokuphalaza kwethusi.
1,Ukuthuthukiswa kwezinto zokuhlanzeka okuphezulu kakhulu
Ubuchwepheshe bokuhlanzwa kwezinsimbi ze-Cu, i-Al kanye ne-Ta e-China bukude nokwezimboni ezithuthukile.Njengamanje, izinsimbi eziningi ezihlanzeke kakhulu ezinganikezwa azikwazi ukuhlangabezana nezidingo zekhwalithi zamasekethe ahlanganisiwe wokuhlohla okuhlosiwe ngokuya ngokwejwayelekile zonke izindlela zokuhlaziya izinto embonini.Inani lokufakwa kokuhlosiwe liphezulu kakhulu noma alisatshalaliswanga ngokungalingani.Izinhlayiya zivame ukwakheka ku-wafer ngesikhathi sokufafaza, okuholela ekujikelezeni okufushane noma isekethe evulekile yokuxhuma, okuthinta kakhulu ukusebenza kwefilimu.
2,Ukuthuthukiswa kobuchwepheshe bokulungiselela i-copper sputtering
Ukuthuthukiswa kobuchwepheshe bokulungiselela i-copper sputtering target ikakhulukazi kugxile ezicini ezintathu: usayizi wokusanhlamvu, ukulawula ukuma nokufana.Imboni ye-semiconductor inezidingo eziphakeme kakhulu zokuhloswa kwe-sputtering kanye nezinto zokusetshenziswa ezihwamukayo.Inezidingo eziqinile zokulawula usayizi wezinhlamvu ezingaphezulu kanye nokuma kwekristalu kwethagethi.Usayizi wokusanhlamvu wethagethi kufanele ulawulwe ku-100μ M ngezansi, ngakho-ke, ukulawulwa kosayizi wokusanhlamvu kanye nezindlela zokuhlaziya nokuhlonza ukuhlobana kubaluleke kakhulu ekuthuthukisweni kwethagethi yensimbi.
3,Ukuthuthukiswa kokuhlaziya kanyeukuhlola ubuchwepheshe
Ukuhlanzeka okuphezulu kokuhlosiwe kusho ukuncishiswa kokungcola.Esikhathini esedlule, i-plasma (ICP) ne-atomic absorption spectrometry yayisetshenziselwa ukunquma ukungcola, kodwa eminyakeni yamuva nje, ukuhlaziywa kwekhwalithi ye-glow discharge (GDMS) nokuzwela okuphezulu kuye kwasetshenziswa kancane kancane njengendlela evamile. indlela.Indlela ye-RRR eyinsalela yokumelana isetshenziswa kakhulu ekunqumeni ubumsulwa bukagesi.Umgomo wayo wokunquma ukuhlola ukuhlanzeka kwesisekelo sensimbi ngokukala izinga lokusatshalaliswa kokungcola nge-elekthronikhi.Ngenxa yokuthi ukulinganisa ukumelana ekamelweni lokushisa kanye nezinga lokushisa eliphansi kakhulu, kulula ukuthatha inombolo.Eminyakeni yamuva, ukuze uhlole ingqikithi yezinsimbi, ucwaningo lokuhlanzeka okuphezulu kakhulu lusebenza kakhulu.Kulokhu, inani le-RRR liyindlela engcono kakhulu yokuhlola ubumsulwa.
Isikhathi sokuthumela: May-06-2022