Ithagethi ye-sputtering yinto ye-elekthronikhi eyakha ifilimu elincanyana ngokunamathisela into efana nengxubevange noma i-oxide yensimbi ku-substrate ye-elekthronikhi ezingeni le-athomu.Phakathi kwazo, i-sputtering target yefilimu eba mnyama isetshenziselwa ukwenza ifilimu ku-organic EL noma iphaneli ye-liquid crystal ukwenza mnyama izintambo futhi kuncishiswe ukubonakaliswa kokukhanya okubonakalayo (ukukhanya okuphansi) kwezintambo ze-TFT.Ithagethi ye-sputter inezinzuzo nemiphumela elandelayo.Uma kuqhathaniswa nemikhiqizo yangaphambilini, kusiza ukuthuthukisa izinga eliphezulu lokucoliseka kanye nenkululeko yokuklama yezibonisi ezihlukahlukene, futhi kunciphise umsindo obangelwa izintambo ezibonisa ukukhanya kwemikhiqizo ehlobene ne-semiconductor.
Izinzuzo kanye nemiphumela yethagethi ye-aluminium:
(1) Ngemva kokuba ithagethi ye-aluminium kwakhiwa phezu kwezintambo, ukukhanya okubonakalayo kungancishiswa
uma kuqhathaniswa nemikhiqizo yangaphambilini, ingafinyelela ukubonakaliswa okuphansi.
(2) I-DC sputtering ingenziwa ngaphandle kwegesi esebenzayo
uma kuqhathaniswa nemikhiqizo yangaphambilini, kuyasiza ukuqaphela i-homogeneity yefilimu yama-substrates amakhulu.
(3) Ngemva kokwakhiwa kwefilimu, inqubo yokufaka ingenziwa kanye ne-wiring
lungisa impahla ngokwenqubo ekhona yokuqopha yekhasimende, futhi ingahlanganisa izintambo ngaphandle kokushintsha inqubo ekhona.Ngaphezu kwalokho, inkampani izophinde inikeze ukwesekwa ngokuvumelana nezimo ze-sputtering zamakhasimende.
(4) Ukumelana nokushisa okuhle kakhulu, ukumelana kwamanzi ne-alkali
ngaphezu kokumelana kwamanzi nokumelana ne-alkali, iphinde ibe nokumelana nokushisa okuphezulu, ngakho izici zefilimu ngeke zishintshe kwinqubo yokucubungula izintambo ze-TFT.
Isikhathi sokuthumela: Aug-10-2022