Izinhloso ze-sputtered molybdenum zisetshenziswe kakhulu embonini ye-elekthronikhi, amaseli elanga, ukumboza ingilazi, nezinye izinkambu ngenxa yezinzuzo zazo zemvelo.Ngokuthuthuka okusheshayo kobuchwepheshe besimanje ku-miniaturization, ukuhlanganiswa, ukwenziwa kwedijithali, kanye nobuhlakani, ukusetshenziswa kwezinhloso ze-molybdenum kuzoqhubeka nokwanda, futhi nezidingo zekhwalithi kuzo nazo zizokhuphuka kakhulu.Ngakho-ke sidinga ukuthola izindlela zokuthuthukisa izinga lokusebenzisa okuhlosiwe kwe-molybdenum.Manje, umhleli we-RSM uzokwethula izindlela ezimbalwa zokuthuthukisa izinga lokusebenzisa i-sputtering molybdenum target kuwo wonke umuntu.
1. Faka ikhoyili kagesi ohlangothini olungemuva
Ukuze kuthuthukiswe izinga lokusetshenziswa kwethagethi ye-molybdenum ene-sputtered, ikhoyili kazibuthe inganezelwa ohlangothini olungemuva lwethagethi ye-Magnetron sputtering molybdenum, futhi indawo kazibuthe ebusweni bethagethi ye-molybdenum inganyuswa ngokwandisa amandla ikhoyili kagesi, ukuze kuthuthukiswe izinga lokusetshenziswa kwethagethi ye-molybdenum.
2. Khetha okokusebenza okuqondiwe okuphendukisa ngamashubhu
Uma kuqhathaniswa nethagethi eyisicaba, ukukhetha ukwakheka kwethagethi ezungezayo kugqamisa izinzuzo zayo ezinkulu.Ngokuvamile, izinga lokusetshenziswa kokuhlosiwe okuyisicaba lingama-30% kuya ku-50% kuphela, kuyilapho izinga lokusebenzisa okuhloswe ngalo ukuzungezisa amashubhu lingafinyelela ngaphezu kwama-80%.Ngaphezu kwalokho, lapho usebenzisa ishubhu elizungezayo eliyi-Magnetron sputtering target, njengoba ithagethi ingazungeza umhlangano kazibuthe webha engaguquki ngaso sonke isikhathi, ngeke kube nokuhlehliswa kabusha endaweni yayo, ngakho-ke impilo yethagethi ezungezayo ngokuvamile ingaphezu kwezikhathi ezi-5 ubude. kunalokho okuhloswe yindiza.
3. Faka okunye esikhundleni ngemishini emisha yokuphalaza
Isihluthulelo sokuthuthukisa izinga lokusetshenziswa kwezinto ezihlosiwe ukuqedela ukushintshwa kwemishini yokufafaza.Phakathi nenqubo yokufafaza yezinto ezihlosiwe zokufafaza kwe-molybdenum, cishe ingxenye eyodwa kwesithupha yama-athomu afafazayo izofaka odongeni lwegumbi le-vacuum noma kubakaki ngemva kokushaywa ama-ion e-hydrogen, okwandisa izindleko zokuhlanza okokusebenza kwe-vacuum nesikhathi sokuphumula.Ngakho-ke ukushintsha imishini emisha yokufafaza nakho kungasiza ukuthuthukisa izinga lokusebenzisa okuhlosiwe kwe-sputtering molybdenum.
Isikhathi sokuthumela: May-24-2023