Abangani abaningi mayelana nokugcinwa kwethagethi kunemibuzo eminingi noma emincane, muva nje kukhona amakhasimende amaningi abonisana mayelana nokugcinwa kwezinkinga ezihlobene nokuhlosiwe, ake sivumele umhleli we-RSM ukuthi sabelane mayelana nolwazi lokugcinwa kwethagethi .
Izinhloso ze-sputter kufanele zigcinwe kanjani?
1. Ukugcinwa kwethagethi
Ukuze ugweme ukujikeleza okufushane kanye ne-arcing okubangelwa umgodi ongcolile enqubweni ye-sputtering, kuyadingeka ukususa ngezikhathi ezithile ama-sputters aqoqwe phakathi nezinhlangothi zombili ze-sputtering track, okusiza futhi abasebenzisi ukuthi baqhume ngokuqhubekayo ngobuningi bamandla amakhulu.
2. Isitoreji esiqondisiwe
Sincoma ukuthi abasebenzisi bagcine okuqondiwe (noma ngabe insimbi noma i-ceramic) kuphakheji ye-vacuum, ikakhulukazi okuqondiwe okufanelekile kufanele kugcinwe endaweni engenalutho ukuze kuvinjelwe i-oxidation yesendlalelo esifanelekayo ukuthi singathinti ikhwalithi yokufaka.Ngokuqondene nokupakishwa kwezinhloso zensimbi, siphakamisa ukuthi kufanele zifakwe emasakeni epulasitiki ahlanzekile okungenani.
3, Ukuhlanza okuhlosiwe
Isinyathelo sokuqala ukuhlanza ngendwangu ethambile yamahhala efakwe ku-acetone;
Isinyathelo sesibili sifana nesinyathelo sokuqala, ukuhlanza ngotshwala;
Isinyathelo sesi-3: hlanza ngamanzi angcolile.Ngemuva kokuhlanza ngamanzi angcolile, ilitshe lifakwa kuhhavini futhi lomiswe ku-100 ℃ imizuzu engu-30.Kunconywa ukusebenzisa "indwangu yamahhala ye-lint" ukuhlanza i-oxide ne-ceramic target.
Isinyathelo sesine ukugeza ilitshe nge-argon ngomfutho ophezulu kanye nomswakama ophansi ukuze kukhishwe noma yiziphi izinhlayiya ezingcolile ezingabangela i-arc ohlelweni lwe-sputtering.
I-4, isheke elifushane kanye nokuqina kokuqina
Ngemuva kokuthi i-target ifakiwe, i-cathode yonke idinga ukuhlolwa ukujikeleza okufushane nokuqina.Kunconywa ukwahlulela ukuthi kukhona isifunda esifushane ku-cathode ngokusebenzisa imitha yokumelana ne-megger.Ngemuva kokuqinisekisa ukuthi ayikho isifunda esifushane ku-cathode, ukuhlolwa kokuvuza kwamanzi kungenziwa, futhi amanzi angangeniswa ku-cathode ukuze anqume ukuthi kukhona ukuvuza kwamanzi.
5. Ukupakisha nezokuthutha
Konke okuhlosiwe kupakishwe ezikhwameni zepulasitiki ezivalwe nge-vacuum ezine-ejenti evikela umswakama.Iphakethe langaphandle ngokuvamile liyibhokisi lokhuni elinongqimba oluvimbela ukushayisana ukuze livikele okuqondiwe kanye nendiza engemuva emonakalweni ngesikhathi sokuthutha nokugcinwa.
Isikhathi sokuthumela: Jul-15-2022