Yiziphi izindima ze-sputtering target ku-vacuum coating

I-vacuum plating ekukhethweni kwezinto ezihlosiwe ze-sputtering kube yinkinga kubantu, okwamanje, njengoba ukugqoka okuxubha, ikakhulukazi ukuthuthukiswa kwamakhono okugcoba i-magnetron sputtering, kungashiwo nganoma yiluphi ulwazi ukuze lukwazi ukukhomba ukulungiswa kwezinto zamafilimu amancane. ngokuqhunyiswa kwe-ion, ngoba ngokufafaza okuhlosiwe ngesikhathi sokumboza ohlotsheni lwe-substrate, kunomthelela obalulekile kwikhwalithi yefilimu yokufafaza,Ngakho-ke, izidingo zezinto eziqondiwe ziqine kakhulu.Lapha sizofunda ngendima ye-sputtering target ekufakweni kwe-vacuum kanye nomhleli we-Beijing Relaxation

一、Isimiso sokukhetha nokuhlukaniswa kwezinto eziqondiwe

Ekukhethweni kwezinto ezihlosiwe, ngaphezu kokusetshenziswa kwefilimu ngokwayo kufanele kukhethwe, izinkinga ezilandelayo kufanele futhi zicatshangelwe:

Inkinga 1. Ngokusho kwezidingo zokusetshenziswa nokusebenza kwe-membrane, kuyadingeka ukuthi izinto ezihlosiwe zihlangabezane nezidingo zobuchwepheshe zokuhlanzeka, okuqukethwe komagazini, ukufana kwengxenye, ukunemba komshini nokunye.

Inkinga 2. Impahla eqondiwe kufanele ibe namandla amahle emishini kanye nokuzinza kwamakhemikhali ngemva kokwakhiwa kwefilimu;

Inkinga 3. Kuyadingeka ukuthi ifilimu ikhiqize ifilimu eyingxube kalula ngegesi esabelayo njengefilimu yokufafaza;

Inkinga 4. Kudingekile ukusetha okuhlosiwe kanye ne-matrix ukuze ibe namandla, ngaphandle kwalokho, impahla yefilimu ene-adhesion enhle ne-matrix kufanele yamukelwe, kuqala i-sputter ungqimba wefilimu engezansi bese ulungiselela ungqimba lwefilimu oludingekayo;

Umbuzo 5. Ngokwesisekelo sokuhlangabezana nezidingo zokusebenza kwefilimu, umehluko omncane phakathi kwe-thermal coefficient yokwandisa okuhlosiwe kanye ne-matrix, ngcono, ukuze kuncishiswe ithonya lokucindezeleka okushisayo kwefilimu e-sputtering;

Ukulungiswa kokuhlosiwe okuningana okuvame ukusetshenziswa

(1) cr target

I-Chromium njenge-sputtering film material akulula nje ukuyihlanganisa ne-base material inokunamathela okuphezulu, futhi ifilimu ye-chromium ne-oxide CrQ3, izakhiwo zayo zemishini, ukumelana ne-asidi nokuzinza kokushisa kungcono.

I-Beijing Ruichi High-tech Co., Ltd. ibambe iqhaza kakhulu kulokhu: ithagethi ye-titanium zirconium, ithagethi ye-aluminium, ithagethi ye-nickel, ithagethi ye-chromium, ithagethi ye-tungsten, ithagethi ye-molybdenum, ithagethi yethusi, ithagethi ye-silicon, ithagethi ye-niobium, ithagethi ye-tantalum, i-titanium-silicon alloy target, titanium-niobium alloy target, titanium-tungsten alloy target, titanium-zirconium alloy target, nickel-chromium alloy target, silica-aluminium alloy target, nickel-vanadium alloy target, chromium-aluminium-silicon ternary alloy target，Ti al I-ternary alloy target material, esetshenziswa kabanzi ekuhlobiseni / indawo eqinile kanye nokugqoka okusebenzayo, ingilazi yezakhiwo, isibonisi esiyisicaba / i-photoelectric optical, isitoreji se-optical, i-electronics, ukuphrinta neminye imisebenzi.